Our Basic Plasma Cleaner is a compact, inexpensive tabletop plasma instrument with a hinged door, viewing window, and fine control metering valve, suitable for nanoscale surface cleaning and activation of small samples.

FEATURES

Compact, tabletop unitAdjustable RF power settings (Low, Medium, High)Maximum RF power of 18WIncludes a 3″ diameter x 6.5″ length Pyrex chamberHinged door with viewing windowActive fan coolingIntegral switch for a vacuum pump1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure1/8″ NPT 3-way valve to quickly switch from introducing gas, venting, and isolating the chamberWeight: 13 lbsSize: 8.5″ H x 10″ W x 8″ DOptional  PlasmaFlo gas mixer allows quantitative control ofup to two (2) process gases and monitoring of vacuum pressureOptional  quartz chamber and sample trayCompatible  vacuum pump available

Our Expanded Plasma Cleaner is a larger benchtop plasma instrument and extensively used for nanoscale surface cleaning and surface activation.

FEATURES

Larger, benchtop unitAdjustable RF power settings (Low, Medium, High)Maximum RF power of 30WIncludes a 6″ diameter x 6.5″ length Pyrex chamberHinged door with viewing windowActive fan coolingIntegral switch for a vacuum pump1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure1/8″ NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamberWeight: 37 lbsSize: 11″ H x 18″ W x 9″ DOptional  PlasmaFlo gas mixer allows quantitative control of up totwo (2) process gases and monitoring of vacuum pressureOptional  quartz chamber and sample trayCompatible  vacuum pump available

REQUIREMENTS

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or lessFor pumping nonreactive gases (air, N2, Ar), see our  Standard Vacuum Pumps.For pumping concentrated or pure oxygen gas, see our  Oxygen Service Pumps.

 With twice the cleaning rate as the Expanded Plasma Cleaner, the High Power Expanded Plasma Cleaner is a versatile instrument, suitable for etching organic thin films (10-100 nm) as well as surface cleaning and modification.

FEATURES

 Larger, benchtop unitAdjustable RF power settings (Low, Medium, High)Maximum RF power of 45WLow RF power setting is equivalent to High RF power setting on PDC-001/PDC-002Includes a 6″ diameter x 6.5″ length Pyrex chamberHinged door with viewing windowActive fan coolingIntegral switch for a vacuum pump1/8″ NPT metering valve to qualitatively control gas flow and vacuum pressure1/8″ NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and ventingWeight: 37 lbsSize: 11″ H x 18″ W x 9″ DOptional  PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of chamber pressureOptional  quartz chamber and sample trayCompatible  vacuum pump available

REQUIREMENTS

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or lessFor pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps.For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps.

 The PlasmaFlo is an optional accessory that may be used with any of our plasma cleaners. The PlasmaFlo provides more precise, quantitative control of the gas flowrate and monitoring of vacuum pressure, both of which are beneficial for process consistency. A second gas source can also be added without having to manually swap gas line.

FEATURES

Dual gas feeds for gas mixing or independent control of two process gasesDual process gas flowmeters49 mL/min maximum flowrate for atmospheric air at 0 psig*± 2% full scale accuracyThermocouple vacuum gauge sensor connects to plasma cleaner doorDigital meter displays pressure range of 1 mTorr to 760 TorrWeight: 7 lbsSize: 8.5″ H x 10″ W x 8″ D* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available. Please inquire.

The optional PDC-VCG provides a vacuum gauge and digital meter as a stand-alone accessory and may be used with any of our plasma cleaner models. The ability to monitor vacuum pressure during plasma processing is beneficial for process repeatability and consistency.

FEATURES

Thermocouple vacuum gauge sensor connects to plasma cleaner doorDigital meter displays pressure range of 1 mTorr to 760 Torr¼” OD hose adapter included to connect gas line to metering valve on plasma cleaner doorWeight: 5 lbs | Size: 5″ H x 10″ W x 8″ D

 

SAMPLE TRAYS

PDC-00T Quartz | PDC-00T-P Pyrex5.5″ W x 6.5″ L for our Expanded Plasma Cleaners

PDC-32T Quartz | PDC-32T-P Pyrex2.75″ W x 6.5″ L for our Basic Plasma Cleaner

Sample trays provide a horizontal surface for loading and unloading of small samples and for batch processingQuartz is recommended as it is purely SiO2 and is a more stable material to use for plasma processingPyrex sample trays are a more affordable option and sufficient for most plasma cleaning applications

QUARTZ CHAMBERS

PDC-00Q for our Expanded Plasma CleanersPDC-32Q for our Basic Plasma Cleaner

Purchase of the plasma cleaner includes a Pyrex chamberPyrex is sufficient for most plasma cleaning applications of glass slides, silicon wafers, and polymersAn optional quartz chamber substitution is recommended for use with fluorinated gases (e.g. CF4) and for samples or applications that are very sensitive to the elements that make up the chemical composition of Pyrex (borosilicate glass)

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.

Rotary vane pumps with hydrocarbon pump oil are suitable for pumping nonreactive or inert gases (e.g. Air, N2 or Ar). These pumps are not intended for pumping oxygen; see our  Oxygen Service Pumps. For corrosive or reactive gases, consult with us directly.

BASIC OIL-BASED VACUUM PUMP

PDC-VPE (115V) | PDC-VPE-2 (230V)

Basic Model (lower cost)Pumping Speed (50/60 Hz): 5.1 m3/hrUltimate Total Pressure (gas ballast closed): 7.5 mTorrUltimate Total Pressure (gas ballast open): 150 mTorrMotor Power (50/60 Hz): 373 WWeight: 27 lbsSize: 9.75″ H x 14″ W x 5.5″ DPump inlet: includes check valve, hose, hose clamps, and hose adaptor to connect plasma cleaner to pump inletPump outlet: includes oil mist filter to filter oil vapor from pump exhaustPDC-VPE-OIL (1 quart) Replacement pump oil

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.

Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2, Ar).Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard).

Uses no oil or fluidPumping speed (50/60 Hz): 3.0/3.6 m3/hrUltimate total pressure: 250 mTorr (pump manufacturer specification; in our lab tests, ultimate pressures of <100 mTorr were attained)Motor power (50/60 Hz): 120 WWeight: 21 lbsDimensions: 7″ H x 14″ W x 5.5″ DPump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inle PDC-OPE-OLTOptional pump outlet connection to conduct pump exhaust to a vent hoodIncludes 9 ft. length exhaust hose (other lengths may be specified)

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.

Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2, Ar).Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard).

Uses no oil or fluidPumping speed (50/60 Hz): 6.2 m3/hrUltimate total pressure (gas ballast closed; 50/60 Hz): 15 mTorrUltimate total pressure (gas ballast open; 50/60 Hz): 38 mTorrMotor power (50/60 Hz): 260 WWeight: 58 lbsDimensions: 12″ H x 17″ W x 11″ DPump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet PDC-OP-OLTOptional pump outlet connection to conduct pump exhaust to a vent hoodIncludes 9 ft. length exhaust hose (other lengths may be specified)