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- VTC-50A
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- VTC-50H
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- VTC-100A
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- VTC-100PA
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- VTC-100PAX
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- VTC200
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- VTC-200P
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- VTC-200PV
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- VTC-300SS-4
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- VTC-300USS
Spin Coater
VTC-100 compact spin coater is CE certified
and designed for material research lab to make quality sol-gel coating at easy and quick upto 4″ wafer. The spin speed is variable from 500-8000 rpm with two programmable segments. The complete accessories are included
for immediate use.
Spin Coater VTC-50A
VTC-50A is an ec onomic desktop Spin Coater with a vacuumless chunk that is designed for the quality coating of sol-gel at the lowest cost. By using grooved spinning templates to hold samples on the rotating plate, the instrument provides the advantages of cost-effectiveness and ease of maintenance. Complete accessories are included for immediate use. (Upgraded to Vacuum-free sample holder since 5/22/20)(Upgraded to 24VDC power input since 09/10/2020)
| Desription | Specification |
|---|---|
| Working Voltage | - 24 VDC |
| - A 110 - 240 VAC to 24 VDC(50/60Hz) NRTL Certified power adapter for worldwide use is included. | |
| Structure | - Heavy-duty Aluminum casting case to keep spinning stably |
| - 24VDC motor | |
| - Ar gas compatible for use in a glovebox | |
| Spin Plates | - The Chamber size is 134mm diameter, can accept wafer sample 4" diameter at Max. |
| - A 4" PTFE spin plate with the groove of 50x50mm is included, which can hold 50 sq mm, 0.3 mm thin sample plate in place during fast-spinning, so-called vacuumless holder | |
| - 7 pcs of 0.3 mm thickness nylon plate is included for holding irregular samples with double-sided tape or carving, please watch the video for more details. | |
| - One roll of 3M removable double-sided tape (3/4' W x 400" L) is included for immediate use | |
| - Please click here to learn how to mount samples on the plate by using removable double-sided tape. It is easy and more economical than vacuum chuck. | |
| - You may use a 50x50mm blank (included) plate to make different groove via a knife to fit your sample, or make an order space grooved plate from us. ( Pic. 2-3） | |
| - You may order a wafer bonding tape to stick large substrate to the spin plate by clicking the pic. 4below: | |
| Spin Speed & Time | - Digital control panel with TWO programmable segments for different spin times and speeds |
| - Spinning speed: 500 - 8000 RPM | |
| - Spinning Time: 1 - 60s | |
| Liquid Injecting | - One 20 mL syringe is included for liquid injection |
| - Support rod and swing-arm for the injector is included for easy coating | |
| - The syringe holder height can be adjusted and rotated freely along the support rod | |
| Optional | - You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for accurate coating (Click Pic 1) |
| - Using plasma cleaner to treat the substrate surface before the coating can improve the film quality | |
| - You may consider our new product: Heatable syringe (Click Pic 4) | |
| Product Dimensions | - 13''(L) x 10''(W) x 7''(H) |
| Net Weight | - 30 lbs |
| Compliance | - CE certificated only |
| - NRTL or CSA certification is available upon request at the extra cost | |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| Application Notes | - In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates. |
| - You may place the compact spin coater into a glove box to operate in inert gas | |
| - Cleaning instruction for the spin coaters. | |
| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. |
| - If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | |
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. | |
| Shipping Dimensions | - 20"(L) x 15"(W) x 20"(H) |
| Shipping Weight | - 60 lbs |
Spin Coater VTC-50H
VTC-50H is a mini spin coater with a vacuum chuck that is designed for quality coating inside the glovebox at a low cost. It can be easily set up and use at a speed of 500 – 8000 r/min. A heating cover and temperature controller are included for fast heating up to 80°C. The mini spin coater is Ar gas compatible can be put in a glovebox through antechamber
| Desription | Specification |
|---|---|
| Power | - Spin Coater: 12VDC, 15W (100 - 240 VAC NRTL Certified power adapter included) |
| - Heating Cover: 24 VDC, 60W (100 - 240 VAC NRTL Certified power adapter included) | |
| Spin Coating | - Max wafer size: 100 mm (4") round or 75 × 75 mm (3" × 3") square |
| - Min wafer size: 20 mm round or 15 × 15 mm square | |
| - Max wafer thickness: 2 mm | |
| - Housing material: Polypropylene | |
| - Spin speed: 500 - 8000 r/min adjustable by the digital speed controller | |
| - Speed accuracy: ± 5 r/min | |
| - Spin time: Unlimited | |
| - Spin direction: Clockwise | |
| Vacuum Chuck | - Vacuum chuck size: 50 mm (2") round |
| - Substrate holding: Vacuum sealing with O-ring or double-sided tape | |
| - Vacuum required: -55 kPa, ≥ 50 lpm | |
| - Tube connection: 8 mm OD tube with quick connector | |
| - A vacuum pump is required, but not included. Please click the picture below to order separately: | |
| Temperature Control | - A heating cover with a temperature controller and sensor probe is included. |
| - Heating element: Polyimide foil heater | |
| - Max Temperature: 80 °C | |
| - Accuracy: ±1 °C | |
| - Max Heating Time: 5 min @ 80 °C | |
| Syringe | - One (1) 20mL syringe is included to contain the coating material |
| Product Dimensions | - 230 (L) × 200 (W) x 150 mm (H) |
| Net Weight | - 5 lbs |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| Optional | - In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates. |
| Warnings | - Do not overflush the base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues that remain in the base and cover. |
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. |
Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
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- Spin Coater VTC-100
Features
– Casting aluminum structure case to keep spinning stable.
– 3 sets of vacuum spin chuck in different size (1”, 2” and 4”)
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1 piece of adhesive tape is included for customer to cut proper size for coating irregular shape substrate
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(e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will suck the tape)
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Digital control panel with two segments programmable two different spin times and speeds
– Two programmable segments with separative configurations (time and speed)
– 500 – 8000 RPM adjustable
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Drainage outlet and vacuum pump connector are on the back panel.
– 20 mL syringe is used to contain the coating material.
– The syringe holder can adjust the height and rotate freely along the support rod.
– One Filter is included as the standard accessory. It is used to connected between pump and coater to prevent waste water flowing into pump via pipe.
– Vacuum pump is not included in the standard package please click here to order oilless pump
Specification
– Input Power: AC 110V/220V selectable. (There is a built in power socket on the right side of the VTC-100 spin coater.
It is used to supply the power for the vacuum pump. The output voltage of this power supply depends on the input voltage
to the spin coater main circuit.
(e.g. if the spin coater is plugged in to the AC 110V power socket, then the built in power socket will supply AC 110V.)
– Motor Power: 150w
– Dimension: 13” x 10” x 8.5”
– Net Weight: 33 lbs
– Shipping dimension: 18″ x 14″ x 15″
– Shipping weight: 100 lbs
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Warranty: One year
– Compliance: CE certified
Spin Coater VTC-100PA
VTC-100PA is a tabletop spin coater up to 5″ diameter at Max. 10000 rpm. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. This spin coaster can be used inside the glovebox with Ar gas.
| Desription | Specification | |
|---|---|---|
| Main Features | - 500 ~ 10000 RPM spinning speed programmable | |
| - Accept substrate from 5 mm to 5" | ||
| - PP chamber for anti-corrosive operation. | ||
| - One gas inlet port on top of the cover which can fill inert gas during coating | ||
| - One 20ml Plastic Syringe is included | ||
| - Suitable using Ar gas (vacuum pump must be outside glovebox) | ||
| - The safety interlock is integrated into the lid | ||
| Vacuum Chuck | - Chamber size: 150 mm diameter | |
| - 2 sets of PP anti-corrosive vacuum chucks with different sizes (O-ring ID Φ44mm, Φ10mm), which can hold substrate from 5 mm to 5" Dia. ( see pic below ) | ||
| - Click the picture below right to watch the demo video for how to use 9mm vacuum chuck hold 5mm sample. | ||
| Vacuum Pump | - One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. (Pic.1) | |
| - Vacuum grade rubber pipe is included for immediate use. | ||
| - For Ar glove box user, feedthrough is required for connecting the spin coater to the vacuum pump outside of the glovebox. The feedthrough is NOT included in the standard package, please contact us for more information. | ||
| Programmable Control | - The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click the picture left to see typical program setting) | |
| - Speed: 500 rpm - 10000 rpm programmable | ||
| - Duration up to 60 seconds for each segment | ||
| - Acceleration: 100 - 2000 rpm / sec adjustable | ||
| - Accuracy: < 5% | ||
| Input Power | - AC 220V (Please email us for AC 110V Version) | |
| - 1000 W total for the oilless pump and spin cater | ||
| - 24VDC high-speed motor | ||
| Gas Inlet | - 6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment. | |
| Liquid Injection | - Standard Package: 20ml plastic syringe with needle | |
| - Option 1: Precision Electronic Single Channel Pipette: 20 - 200uL | ||
| - Option 2: Heatable glass syringe with temp. controller, up to 200C | ||
| Optional | - Option 1: PE Heating cover with a digital single-point PID temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. The drying process solidifies the as-coated film in less than a few minutes. | |
| - Option 2: Both PTFE Heating cover + 10mm dia. PTFE vacuum chuck set is capable of high temperature up to 200°C (<10 minutes). A 30-segment programmable PID temperature controller is used for this option. (44mm dia. vacuum chuck is not included) | ||
| - Option 3: UV LED lights and controller for curing and polymerization. (New) | ||
| Product Dimensions | - 450mm Depth ×280mm W ×340mm H | |
| Net Weight | 20 kg | |
| Warranty & | - One year limited with lifetime support | |
| Compliance | - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| - CE Certified | ||
| - NRTL or CSA certification is available at an extra cost. | ||
| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues that remain in the bow/base. | |
| - Please turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | ||
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. | ||
| Shipping Dimensions | - 40"(L) x 30"(W) x 30"(H) | |
| Shipping Weight | - 46 kg (100 lbs) |
Spin Coater VTC-100PAX
VTC-100PAX is ultra-fast spin coater up to 12500 rpm for Max. 5″ dia. wafer. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has an LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. The spin-coater can be used in the glovebox with Ar gas.
| Desription | Specification |
|---|---|
| Main Features | - 500 ~ 12500 RPM spinning speed programmable ( 13000 max for < 60 seconds) |
| - Accept substrate from 10 mm to 5" | |
| - PP chamber for anti-corrosive operation. | |
| - One gas inlet port on top of the cover which can fill inert gas during coating | |
| - One 20ml Plastic Syringe is included | |
| - Suitable using Ar gas (vacuum pump must be outside glovebox) | |
| - The safety interlock is integrated into the lid | |
| Vacuum Chuck | - Chamber size: 150 mm diameter |
| - 2 sets of PP anti-corrosive vacuum chucks with different sizes (O-ring ID: Φ20mm ), which can hold substrate from 20mm to 100 Dia. | |
| Vacuum Pump | - One Compact Oil-Free Diaphragm Pump Made in Germany is included with UL/CSA/Ce certified, please click the picture left for specification details. (Pic.1). This pump can be used in Ar gas glovebox. |
| - Vacuum grade rubber pipe is included for immediate use. | |
| - For Ar glove box user, feedthrough is required for connecting the spin coater to the vacuum pump outside of the glovebox. The feedthrough is NOT included in the standard package, please contact us for more information. | |
| Control Panel | - The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click picture below-right to see typical program setting) |
| - Speed: 500 rpm - 12500 rpm programmable | |
| - Duration: 0 - 999 seconds for each segment | |
| - Acceleration: 100 - 2000 rpm / sec adjustable | |
| - Speed Accuracy: < 5% | |
| Input Power | - AC 110V or 220V is selectable ( please confirm before order ) |
| - 1000 W total for the oilless pump and spin cater | |
| - 24VDC high-speed motor | |
| Gas Inlet | - 6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under an inert gas flow environment. |
| Liquid Injection | - Standard Package: 20ml plastic syringe with needle. May consider the options below |
| - Option 1: Precision Electronic Single Channel Pipette: 20 - 200uL | |
| - Option 2: Heatable glass syringe with temp. controller, up to 200C | |
| Optional | - Option 1: PE Heating cover with a digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after the coating process is completed. Click demo video & picture below for detail. |
| - Option 2: PTFE Heating cover + PTFE vacuum chuck set is capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Please click PTFE Heating cover and chuck set to learn. | |
| - Option 3: UV lighting Cover with the controller for drying polymer film quickly (New) | |
| Product Dimensions | - Click the picture to see detail |
| Net Weight | 12 Kg |
| Warranty & | - One year limited with lifetime support |
| Compliance | - Rusting and damage due to improper storage condition or maintenance are not covered by warranty |
| - CE Certified | |
| - NRTL or CSA certification is available at the extra cost. | |
| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. |
| - If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | |
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. | |
| Shipping Dimensions | - 40"(L) x 30"(W) x 30"(H) |
| Shipping Weight | - 46 kg (100 lbs) |
Spin Coater VTC-200
VTC-200 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 8″ diameter or 5″ x 5″ square . The spinning speed is variable from 500-6000 rpm with two programmable segments. The heatable cover is optional, which allow drying sample after coating.
| Desription | Specification |
|---|---|
| Structure | - Aluminum casting case to keep spinning stably |
| - Drainage outlet and vacuum pump connector are on the back panel | |
| - One filter is included in the standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump | |
| - One oilless pump is included in the standard package. | |
| Chamber & Vacuum Chuck | - The chamber diameter is 250 mm and can accept wafer 8" Dia max. or 5"x5" square |
| - The spinning chamber is made of PP which is corrosive resistant | |
| - One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers | |
| - 1 piece of Adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates or wafer with size < 6" | |
| - Place the irregularly shaped substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction | |
| Spin Speed | - Digital control panel with two programmable segments of different spin times and speeds |
| - 500 - 6000 RPM adjustable spinning speed for each segment | |
| Liquid Injecting | - 20mL syringe is used to contain the coating material |
| - The syringe holder height can be adjusted and rotated freely along the support rod | |
| Optional | - You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating (Click Pic 1) |
| - Using plasma cleaner to treat substrate surface before the coating can improve film quality | |
| - You may consider our new product: Heatable syringe (Click Pic 4) | |
| - Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available (Click Pic 5) | |
| Input Power | - AC 110V/220V selectable |
| - There is a built-in power socket on the right side of the VTC-200 spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built-in power socket will supply AC 110V) | |
| Motor Power | - 90VDC, 150W |
| Product Dimensions | - 500mm(L) x 400mm(D) x 400mm(H) |
| Net Weight | 20 kg (44 lbs) |
| Compliance | - CE Certified |
| - NRTL certification is NOT available temporary. | |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| Warnings | -Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. |
| - If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | |
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. | |
| Shipping Dimensions | - 45"(L) x 30"(W) x 30"(H) |
| Shipping Weight | - 46 kg (100 lbs) |
Spin Coater VTC-200P
VTC-200P is Anti-Corrosion Spin Coater made of Polypropylene (PP) material, which can be used for active acidic or alkali solution, especially suitable for use inside glovebox under Ar gas. 4” dia. vacuum chuck is included for coating wafer up to 6″. The digital control box is separated from a spin coater which allows you to operate in the remote location. The spinning speed is variable from 500-8000 rpm with six programmable segments. The package includes the oilless vacuum pump and a 20ml syringe for immediate use. This spin coater can be used under Argon atmosphere inside the glovebox
| Desription | Specification |
|---|---|
| Structure | - Case and spin disk made of Polypropylene (PP) to resist most of the corrosive solutions. |
| - The digital control box is separated from the spin coater. | |
| - One filter is included in the standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump. | |
| - One oil-less vacuum pump is included in the standard package; please click here for specification details. | |
| Input Power | - Default 220VAC, 50/60Hz, single phase, 1000W Max. |
| - 110V is available in optional bar ( with 1500W transformer ) | |
| - A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.) | |
| Chamber & Vacuum Chuck | - Chamber diameter: 150 mm |
| - The vacuum chuck: Φ100mm, which can hold substrate 4" to 6" Dia. ( Pic. 1) | |
| - If your sample < 4", please order small chunk with rubber cup at extra cost ( click Pic. 2 ) | |
| - You may use blue tape for the sample with irregular shape (Pic. 3) | |
| Vacuum Pump | - One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. (Pic.1) |
| - To put the pump inside Ar glovebox, please use a quiet 24vdc dry pump (Pic. 2 ) | |
| Spin Speed | - Digital control panel with six programmable segments of different spin times and speeds |
| - Maximum programmable spin time 6*60s = 360s | |
| - 500 - 8000 RPM adjustable spinning speed at each segment | |
| - 10000 RPM is available upon request at the extra cost. | |
| - Special DC motor which can use run under Ar gas and inert gas atmosphere inside a glove box. | |
| Liquid Injecting | - 20mL syringe is used to contain the coating material (Click Pic 1) |
| Optional | - You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for better coating (Pic. 1 ) |
| - Using a plasma cleaner to treat the substrate surface before the coating can improve film quality (Pic. 2) | |
| - You may consider our new product: Heatable syringe (Click Pic 3) | |
| - Heating cover with a digital temperature controller up to 120 ℃ is available upon request at extra cost, which allows sample drying in-situ during and after coating (Click Pic 4 & 5). Please confirm 110V or 220V version when you order. | |
| - Vacuumable spin coater with digital gauge is available ( Pic. 6) | |
| - If you need to place the coater into a glovebox (Pic. 7), Please let us know in advance. The KF40 feedthrough is needed to connect the power cable of the control box and vacuum pump to the outside glovebox at the extra cost. (Pic.8) | |
| Motor | - 24VDC, Brushless, 200W max.: |
| Product Dimensions | 1. Spin Coater:250mm(Φ) x 560mm(H) with cap opened |
| (Click the Pictures for details) | 2. Spin Coater:250mm(Φ) x 560mm(H) with Syringe installed |
| 3. Spin Coater:250mm(Φ) x 560mm(L) x 560mm(H) from side view | |
| 4. Digital controller:380mm(L) x330mm(W) x150mm(H) | |
| 5. Temperature Controller: 230mm L x 260mm W x 120 mm H | |
| 6. Vacuum Pump:290 L x 210 W x 213 H (mm) | |
| - Connecting cables and tubes: | |
| - The cable from the spinner to control box: 1.5 meter L, | |
| - The cable from vacuum pump to control box: 1.1 meter | |
| - The tube from spinner to pump: 6.37mm ID x 8 mm OD x 1 meter L | |
| Net Weight | 25 kg |
| Compliance | - CE Certified |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. |
| - If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | |
| - For the cleaning procedure, please review the cleaning instruction for the spin coaters. |
Spin Coater VTC-200PV
VTC-200PV is an atmosphere-controllable spin coater with Polypropylene air tighten, which can make spin coating either under a vacuum or inert gas atmosphere. The sample holder is included for coating wafer up to 6″. The digital control box is separated from the spin coater which allows you to operate in the remote location. The spinning speed is variable from 500-10K rpm with two programmable segments. The package includes the two-stage vacuum pump, digital vacuum gauge, and 20ml syringe for immediate use.
| Desription | Specification |
|---|---|
| Structure | - Case and the spin disk made of Polypropylene (PP) to resist most of the corrosive solutions. |
| - The digital control box is separated from the spin coater. | |
| - One two-stage vacuum pump is included for the spinning chamber and one dry pump for the vacuum chuck. | |
| - The digital vacuum gauge is installed on the top cover of the spin coater | |
| - One filter is included in the standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump. | |
| - The sample can be held either by the mechanical fixture for liquid injection under vacuum or by vacuum chuck for the liquid injection under an inert gas atmosphere | |
| Input Power | - Default 220VAC, 50/60Hz, single phase, 1000W Max. |
| - 110V is available in the optional bar ( with 1500W transformer ) | |
| - A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.) | |
| Chamber & Vacuum Chuck | - Chamber diameter:150 mm |
| - PP anti-corrosive chuck which can hold substrate up to 6" Dia. either by vacuum or by the mechanical fixture | |
| - Vacuum chuck only can be used in the inert gas atmosphere | |
| - Mechanical chuck must be used for vacuum injection | |
| Vacuum | - One 156 L/m Double-Stage Rotary Vane Vacuum Pump with Exhaust Filter is included in the standard package, please click the picture below for specification details. (Pic.1) |
| - Max. vacuum level for the system is 900 m-torr | |
| Spin Speed | - Digital control panel with six programmable segments of different spin times and speeds |
| - Each step can run 999 S max. | |
| - 500 -10K RPM adjustable spinning speed at each segment | |
| Liquid Injecting | - 20mL syringe is used to contain the coating material (Click Pic 1) |
| Motor | - 24VDC, Brushless, 200W max.: |
| Product Dimensions | - Coater: 250mm Dia x 590mm (H) Control Unit: 330mm(L) x 380mm(W) x 165mm (H) |
| Net Weight | 25 kg |
| Compliance | - CE Certified |
| - NRTL or CSA certification is available upon request at the extra cost | |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty | |
| Warnings | - Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base. |
| - If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. | |
| - For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. | |
| Shipping Dimensions | - 40"(L) x 30"(W) x 30"(H) |
| Shipping Weight | - 46 kg (100 lbs) |
Spin Coater VTC-300SS-4
VTC-300SS-4 is the Spin-Spray Coater with four nozzles for multi-layer coating process on a large substrate up to 12″. Three types of spraying heads are selectable: The nozzle driven by compressive gas, 40KHz ultrasonic spraying head, and 120KHz ultrasonic spraying head, based on customer budget and applications.
| Desription | Specification |
|---|---|
| Features | -Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate |
| - Four spray head to make multi-layer coating as program setting through touch screen control panel. | |
| - Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate | |
| Spin Coater | - Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square |
| - One oil-less pump for the vacuum chuck is included and controlled by the spin coater | |
| - Spin speed: 300 - 3000 rpm adjustable | |
| - For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8" | |
| Spray Nozzles | Three types of the spray nozzle are selectable based on your budget |
| Four Compressive gas-driven spray heads (Pic. 1) ( included as standard ) | |
| Four 40KHz ultrasonic spray nozzle with ultrasonic generator（Pic. 2) ( optional) | |
| Four120KHz ultrasonic spray nozzle with ultrasonic generator（Pic. 3) ( optional) | |
| Please click the picture below to see the details specification. | |
| Note： Higher frequency will result in a smaller atomizing and thinner coating, but higher cost | |
| Peristaltic Pumps | - Fours peristaltic pumps are included for delivering four types of the solution as programma. |
| - Flow rate:0.05 - 380 ml/min programmable. | |
| - The four types of solution can be injected during spinning one by one with setting flow rate and duration time | |
| - The solenoid valves are connected to each pump to allow only one solution injection to avoid cross-contamination. | |
| Heating Cover (optional) | - The heatable top cover is available upon request at extra cost |
| - Heating element: Ring type of halogen lamp | |
| - The precision digital controller is included with +/- 1ºC accuracy | |
| - Max. working temperature: 100ºC | |
| Control Panel | - The touch screen control panel can set programma for |
| - Spin speed: 100 - 3000 rpm | |
| - Injection of solution sequence from 1 to 4 pump | |
| - Time of injection for each pump | |
| - Number of cycles | |
| Utility Requirement | - Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total |
| Net Weight | - 160 lbs |
| Shipping Weight & Dimensions | #1: 423 lbs, 48x40x42" |
| #2: 155 lbs, 48x40x35" | |
| Compliance | - CE Certified |
| - NRTL certification is NOT available temporary. | |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty |
SPIN COATER VTC-300USS
VTC-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12″. The system consists of (1) a 12″ spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating. It also can be considered as a atmosphere mist CVD system
| Desription | Specification |
|---|---|
| Features | - Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate |
| - Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate | |
| - The system also works on spin alone and spray alone modes | |
| Spin Coater | - Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square |
| - One oil-less pump for the vacuum chuck is included and controlled by the spin coater | |
| - Spin speed: 300 - 3000 rpm adjustable | |
| - For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8" | |
| Spray Nozzle | - One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included |
| - Two spray nozzles with the KF-25 adapter are included. (Click the first picture from right to see details) | |
| - One cylindrical type -- narrower spray ~20 mm diameter | |
| - One cone type wider spray ~40 mm diameter | |
| - Recommended compressed air pressure for the aqueous solution: ~2 psi | |
| - One flow meter is integrated for regulating and monitoring the compressed airflow | |
| - Fluid viscosity range: 1 - 50 mPa·s (cP) | |
| - One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range | |
| - Low-cost compressive gas atomizing nozzle is available upon request | |
| Heatable Syringe Pump | - A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle |
| - One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter | |
| - Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe) | |
| - Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C | |
| Heat Lamp and Control | - Dual heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for the heating substrate by radiation (up to 65 ºC with 12" metal substrate) |
| Optional | - MTI strongly suggests you place the spin-spray coater inside a fume hood for health and safety concerns. |
| - Compressive gas atomizing spray nozzle is available for NRTL certification (Pic. 2) | |
| - Customized Multi spray head is available upon request ( pic 3 ) | |
| Utility Requirement | - Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total |
| - Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI | |
| - Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator. | |
| Net Weight | - 160 lbs |
| Compliance | - CE Certified |
| - NRTL certification is only available with compressive gas atomizing spray nozzle | |
| Warranty | - One year limited with lifetime support |
| - Rusting and damage due to improper storage condition or maintenance are not covered by warranty |
